Read e-book online A Guide to Hands-on MEMS Design and Prototyping PDF


By Kubby

even if you're a pupil taking an introductory MEMS direction or a working towards engineer who must wake up to hurry speedy on MEMS layout, this functional advisor offers the hands-on event had to layout, fabricate and attempt MEMS units. you are going to how you can use foundry multi-project fabrication techniques for inexpensive MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. various layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, in addition to routines and layout demanding situations on the finish of each bankruptcy. recommendations to the layout problem difficulties are supplied online.

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A Guide to Hands-on MEMS Design and Prototyping by Kubby

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